Material or article handling – Plural – static structures for supporting discrete loads and... – Load-underlying members
Patent
1991-08-05
1994-02-08
Bucci, David A.
Material or article handling
Plural, static structures for supporting discrete loads and...
Load-underlying members
414940, B65G 104
Patent
active
052844129
ABSTRACT:
A stock unit for storing carriers has a stock unit body, a plurality of carrier mounting shelves provided in a side wall of the stock unit body at predetermined spaces in a vertical direction, a carrier station, provided in the lower portion of the stock unit body, receiving and sending a carrier between the stock unit and a carrier part provided in the outside of the stock unit body, a carrier transport device, provided in the lower portion of the stock unit body, for transporting the carrier from the inside of the stock unit body to wafer transfer device provided in the outside of the stock unit body, and a carrier arm mechanism gripping at least one carrier, receiving and sending the carrier between the carrier station and the carrier transport device, and between the carrier mounting shelves and the carrier transport device regardless of the operation of the carrier transport device.
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Shiraiwa Hirotsugu
Tanahashi Takashi
Bucci David A.
Tokyo Electron Sagami Limited
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