Piezoelectric crystalline films and method of preparing the same

Details Piezoelectric crystalline films and method of preparing the same Piezoelectric crystalline films and method of preparing the same

1978-02-02

1979-02-13

Cooper, Jack

Stock material or miscellaneous articles

Composite

Of quartz or glass

204192SP, 252 629, 427100, 428469, 428539, C23C 1500, C04B 3500

Patent

active

041396782

ABSTRACT:
Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of bismuth. These films are prepared by radio-frequency sputtering.

REFERENCES:
patent: 3470100 (1969-09-01), Ballman
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.
Pettsold et al. "Chem. Abstracts", vol. 83, 1975, 186967n.
Mikio et al. "Chem Abstracts", vol. 81, 1974, 128704.
Iga et al. "Chem. Abstracts", vol. 85, 1976, 82363n.

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