Linear and rotational accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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7351402, 7351418, 7351432, 7351421, 7351422, 7351436, 7351438, 73510, G01P 1500

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active

058311645

ABSTRACT:
A two degree of freedom (2 DOF) accelerometer comprising two imbalanced sensing modules (i.e., bar modules having an unbalance) is provided such that two sensing modules are located in the plane to be measured. The two imbalanced sensing modules have force balance and are used to measure linear and angular accelerations in two degrees of freedom. A single modular design is used for both of the axes. Each of the two individual sensing modules has a housing containing a proof mass for each measured output and a support of the proof mass with the support optimized for the sensitive axis selected for sensor output and having high rigidity in all other axes of the support. Also provided is electrostatic servo force balance technology. A proportional-integral-derivative (PID) controller is used to obtain a closed loop bandwidth of 1 kHz and a steady state error of zero for full scale accelerations up to 75 g's and 1000 rad/sec.sup.2.

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