Metal working – Piezoelectric device making
Patent
1996-06-12
1999-09-28
Hall, Carl E.
Metal working
Piezoelectric device making
310328, 310365, 347 70, H01L 4122
Patent
active
059568291
ABSTRACT:
An ink jet recording head including a vibrating plate made of ceramic, a pressure producing chamber forming member, made of ceramic, for forming a plurality of pressure producing chambers in rows, and drive electrodes formed on a surface of the vibrating plate so as to confront the pressure producing chambers. A width W2 of each drive electrode is smaller than a width W1 of each pressure producing chamber. A width W3 of a piezoelectric vibrating element is larger than the width W2 of each drive electrode and smaller than the width W1 of each pressure producing chamber, so that an operation region of the piezoelectric vibrating element is regulated by the width W2 of the drive electrode, and peripheral portions of the piezoelectric vibrating element are reliably bonded to peripheral portions of the drive electrode.
REFERENCES:
patent: 2224520 (1940-01-01), Matsuda
patent: 4680595 (1987-07-01), Cruz-Uribe
patent: 4766671 (1988-08-01), Utsumi et al.
patent: 5045744 (1991-09-01), Ando et al.
patent: 5376857 (1994-12-01), Takeuchi et al.
Abe Tomoaki
Kitahara Kohei
Mukaiyama Keiichi
Usui Toshiki
Hall Carl E.
Seiko Epson Corporation
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