Photocopying – Projection printing and copying cameras – Focus or magnification control
Patent
1997-07-10
1999-04-27
Mathews, Alan A.
Photocopying
Projection printing and copying cameras
Focus or magnification control
355 53, 355 55, 356125, G03B 2734, G03B 2742
Patent
active
058984798
ABSTRACT:
A focus evaluation technique for photolithography equipment is disclosed. This technique includes providing a substrate having a photoresist coating for treatment by the equipment. The equipment is activated to focus a first part of a image on a region of the surface and defocus a second part of the image relative to the region. The region is tilted relative to an image plane defined by the equipment. This activation is repeated for each of a number of spaced-apart regions along the surface. The substrate is processed to provide a pattern for each of the regions corresponding to the first and second parts. The equipment is characterized from the pattern for each of the regions. This characterization may result from inspection of the pattern relative to reference marks provided for each region. Focus information for the equipment which accounts for lens heating may be determined from this inspection.
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Brochure, Cannon-FPA-3000 i4 Fine Pattern Aligner, High NA, High Throughput 5x i-Line Stepper. (Copyright date 1995).
Hubbard Walter Bryan
Kirk Rosanna
Mathews Alan A.
VLSI Technology Inc.
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