Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-12-28
1997-02-04
Gonzalez, Frank
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356349, 372 19, G01B 902
Patent
active
056004427
ABSTRACT:
A position detecting apparatus comprises a light emitter which activates a laser source to emit a light beam so that mode hopping occurs, an interference optical system which directs the light beam from the laser source to a measuring light path on which an object to be measured is located and a reference light path on which a reflection mirror is placed and merges the reflected light beams coming back on the light paths so that the reflected light beams interfere with each other, a light sensor which receives the interference light beam provided by the interference optical system, and a position detector which determines the position of the object of measurement based on the interference signals produced by the light sensor before and after mode hopping caused by the light emitter.
REFERENCES:
patent: 5106191 (1992-04-01), Ohtsuka
patent: 5185643 (1993-02-01), Vry et al.
patent: 5198873 (1993-03-01), Ishizuka et al.
patent: 5353115 (1994-10-01), McIntyre
patent: 5453833 (1995-09-01), Kawashima et al.
Kawashima Hiroyuki
Minegishi Isao
Saito Susumu
Gonzalez Frank
Kabushiki Kaisha Topcon
Kananen Ronald P.
Kim Robert
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