Electric heating – Metal heating – By arc
Patent
1996-06-11
1999-04-27
Evans, Geoffrey S.
Electric heating
Metal heating
By arc
359622, B23K 2600
Patent
active
058977996
ABSTRACT:
A laser processing apparatus including a laser device for emitting a first laser beam having a first cross section having a length and a width and an optical system for modifying the first laser beam to produce a second laser beam having a virtual focus. The second laser beam has a second cross section of which length is larger than the length of the first cross section and is constant with propagation of the second laser beam. The apparatus further includes a condenser located after the virtual focus for focusing the second laser beam on a specimen to be treated, wherein said second laser beam is condensed in only a widthwise direction of the cross section, and device for moving the specimen along the widthwise direction. Specifically, laser processing apparatus may include a laser device, a vertical fly-eye lens for homogenizing an intensity along a lengthwise direction of the first cross section, a mirror for directing the laser beam and cylindrical convex lens.
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Ishihara Hiroaki
Yamazaki Shunpei
Zhang Hongyong
Evans Geoffrey S.
Ferguson Jr. Gerald J.
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
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