Projection type exposure apparatus and method of exposure

Details Projection type exposure apparatus and method of exposure Projection type exposure apparatus and method of exposure

1993-02-22

1994-08-02

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742

Patent

active

053350448

ABSTRACT:
A projection type exposure apparatus comprises:

REFERENCES:
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5251067 (1993-10-01), Kamon
patent: 5253040 (1993-10-01), Kamon et al.
patent: 5264898 (1993-11-01), Kamon et al.
The Japan Society of Applied Physics, "The 52nd Autumn Meeting, 1991", pp. 600-603.
Naomasa Shiraishi, et al, "New Imaging Technique for 64M-DRAM", SPIE vol. 1674, Optical/Laser Microlithography V (1992), pp. 741-752.

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