Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-12-28
1997-02-04
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310324, H01L 4108
Patent
active
056001975
ABSTRACT:
A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and an integrally formed diaphragm portion for closing each window, and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in this order on the diaphragm portion. The piezoelectric/electrostrictive layer consists of a dense body having a crystal grain size of not smaller than 0.7 .mu.m, and a porosity (x) of not greater than 15%, and the diaphragm portion has a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of the diaphragm portion, with respect to a length of a shortest line which extends across the corresponding window and passes a center of the window. Further, the porosity (x) and the deflection percentage (y) satisfies the following formula: y.ltoreq.0.1167x.sup.2 -3.317x+25.5. Also disclosed are three methods for producing the piezoelectric/electrostrictive film element as described above.
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"Introduction to Ceramics" by W. Kingery et al. pp. 518-521.
Nanataki Tsutomu
Takeuchi Yukihisa
Dougherty Thomas M.
NGK Insulators Ltd.
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