Vertically integrated sensor structure and method

Details Vertically integrated sensor structure and method Vertically integrated sensor structure and method

1996-07-22

1997-02-04

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

G01L 906

Patent

active

056000715

ABSTRACT:
A vertically integrated sensor structure (60) includes a base substrate (71) and a cap substrate (72) bonded to the base substrate (71). The base substrate (71) includes a transducer (78) for sensing an environmental condition. The cap substrate (72) includes electronic devices (92) formed on one surface to process output signals from the transducer (78). The sensor structure (60) provides an integrated structure that isolates sensitive components from harsh environments.

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