Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1998-05-14
2000-02-29
Diamond, Alan
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20419215, 20419229, 20429813, 20429812, 501126, 501134, 419 23, 419 25, 419 31, 419 42, 419 49, 423624, 423115, 423593, 420129, 420555, 420590, 428697, 428701, 428702, C01G 1900, H01B 108, C01B 1332
Patent
active
06030507&
ABSTRACT:
A process for making a crystalline solid-solution powder which involves reacting at least two reactants in a plasma arc of a plasma chamber and blast-cooling the resultant product in a high velocity gas stream to form the powder. The first reactant is a molten metal alloy and the second reactant is a gas. The reaction is carried out in a plasma arc and the products rapidly cooled by a gas stream acting at the outlet opening of the plasma chamber. The crystalline solid-solution powder formed by the process has a low electrical resistivity. If an indium-tin alloy is used as the first reactant and oxygen as the second reactant, there is obtained an indium-tin-oxide (ITO) crystalline solid-solution powder which, when compacted to 40% of its theoretical density, has an electrical resistivity in the range of about 2 .OMEGA.cm. This ITO crystalline solid-solution powder is particularly suitable for preparing an ITO target, with high electrical conductivity and thus high achievable sputtering rates.
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Gorywoda Marek
Lupton David Francis
Schielke Jorg
Scholz Friedhold
Serole Bernard
Diamond Alan
W.C. Heraeus GmbH & Co. KG
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