Method for manufacturing bipolar transistor having reduced base-

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437 89, 437 90, 437 91, 437 92, 437 99, 437101, 148DIG10, 148DIG11, H01L 2170

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055997236

ABSTRACT:
In a process for manufacturing a bipolar transistor, an intrinsic base is formed by a selective epitaxial growth while the lower surface of a base electrode single crystal silicon film 33 and the surface of a collector epitaxial layer 3 are exposed. In this process, the intrinsic base 8 and an extrinsic base 34 are grown as a single crystal to form a self-alignment type bipolar transistor having a reduced parasitic capacitance between the base and the collector.

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