Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent
1997-08-12
2000-02-29
Werner, Frank E.
Material or article handling
Chamber of a type utilized for a heating function and...
Charging of chamber
432239, 414589, 414940, 414749, 414222, 118729, F27D 300
Patent
active
060301678
ABSTRACT:
An apparatus for loading wafers into horizontal quartz tube, the apparatus includes a base plate, holding plate, trolley main body and two supporting bases. The base plate has a plurality of stages, which is lifted by a loading rod and fixed atop thereon, for placing wafers. The holding plate has a plurality of fixing screws and altitude adjusting screws for supporting the base plate and changing an altitude of the base plate to match an altitude of wafer boat. The trolley main body, which supports the holding plate by supporting pillars, provides with a plurality of position holes for carrying the holding plate and moving the base plte. The two supporting bases are connected by a solid plate, whose both ends are respectively attached at hollows formed at the middle of each of the two supporting bases. The two supporting bases are provided with a pair of slide bearings on either side of the solid plate. The slide bearings are fitted with two parallel silde shafts out of the horizontal quartz tube, thereby allowing the two supporting bases to travel along the slide shaft into and out of the horizontal quartz tube. In addition, the supporting bases have several pins adapted to mate with the position holes of the trolley main body to mount the trolley main body on the solid plate, thereby allowing the wafer boat to move along with the two supporting bases.
REFERENCES:
patent: 4253792 (1981-03-01), Nishikawa
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4543059 (1985-09-01), Whang et al.
patent: 4744712 (1988-05-01), Mitchell
patent: 4876225 (1989-10-01), Wagner et al.
Chu Eric
Lin Peter Yu-Tsai
United Microeletronics Corp.
Werner Frank E.
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