Method for providing a piezoelectric substrate and surface acous

Details Method for providing a piezoelectric substrate and surface acous Method for providing a piezoelectric substrate and surface acous

1997-01-22

1999-04-27

Vo, Peter

Metal working

Piezoelectric device making

310313A, 310313B, H01L 4122

Patent

active

058966366

ABSTRACT:
A piezoelectric substrate (120) and a method for preparing same. The method includes steps of (i) providing a boule of piezoelectric material, (ii) orienting the boule to Euler angles chosen to provide a boundary condition matched to a partially-metallized surface and (iii) sawing the boule into at least a first slice (120) having first and second surfaces, at least one of the first and second surfaces comprising a planar surface. The method desirably but not essentially further includes steps of (iv) polishing at least one of the first and second surfaces to provide a substantially planar polished surface, (v) disposing a layer of metal on the at least one of the first and second surfaces and (vi) patterning the layer of metal to provide at least one interdigitated pattern (105, 110) comprising an acoustic wave transducer (105, 110), the acoustic wave transducer (105, 110) providing the boundary condition matched to a partially-metallized surface.

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