Methods of fabricating micromotors with utilitarian features

Details Methods of fabricating micromotors with utilitarian features Methods of fabricating micromotors with utilitarian features

1997-01-14

2000-02-29

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

29424, 310 40MM, 430312, 430319, H02K 1504

Patent

active

060293373

ABSTRACT:
Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of a polygon (nickel) mirror on a polysilicon, electrostatic micromotor rotor for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micromotor constructions.

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