Test fixture capable of electrically testing an integrated circu

Details Test fixture capable of electrically testing an integrated circu Test fixture capable of electrically testing an integrated circu

1987-11-24

1989-04-11

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158P, G01R 104, G01R 1073

Patent

active

048209767

ABSTRACT:
A high performance test fixture is disclosed for testing integrated circuit chips which permits high throughput and good heat dissipation wherein flexible contact apparatus carried by said test fixture are urged into contact with the corresponding contacts on an integrated circuit chip using a pressurizable chamber wherein the flexible contact member carrying the test fixture contacts constitutes one wall of the chamber whereby pressurizing the chamber urges the flexible contact member and the contacts carried thereon against the chip. In a preferred embodiment, the chamber is pressurized by a cooling gas which compensates for the heat generated during the testing; and the test fixture is provided with apparatus to vibrate the contacts thereon in a lateral direction over the chip contacts to thereby remove oxide on the chip contacts to ensure a better electrical contact between the chip contacts and the test fixture contacts.

REFERENCES:
patent: 3453545 (1969-07-01), Oates
patent: 3842346 (1974-10-01), Bobbitt
patent: 3979671 (1976-07-01), Meeker et al.
patent: 3996516 (1976-12-01), Luther
patent: 4172993 (1979-10-01), Leach
patent: 4357575 (1982-11-01), Uren et al.
patent: 4616406 (1986-10-01), Brown
patent: 4636722 (1987-01-01), Ardezzone
patent: 4734872 (1988-03-01), Eager et al.
"Cooling System for an Integrated Circuit Tester", by Chu et al., IBM Tech. Disc. Bull., vol. 13, #11, 4/71, p. 3547.

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