Photomask positioning device

Details Photomask positioning device Photomask positioning device

Filed on

1987-09-04

Date issued

1989-04-11

Examiner

Nelms, David C.

Patent Class

Radiant energy

SubClass

Photocells; circuits and apparatus

SubSubClass

Photocell controls its own optical systems

Other Related Categories

414416, G01N 2186

Type

Patent

Status

active

Patent number

048209309

Description

ABSTRACT:
A positioning device for positioning a mask having formed thereon a pattern to be transferred onto a semiconductor wafer. On the basis of a peripheral shape of the mask, the positioning device positions the mask so that a center of the mask is brought into alignment with a center of rotation of a holder for holding the mask. The positioning device includes a plurality of engaging pins to be engaged by the periphery of the mask, each engaging pin being movable in a direction toward the center of rotation of the mask holder. Movement of each of the engaging pins is controlled independently from the others, whereby the mask can be positioned irrespective of its size and/or shape.

REFERENCES:
patent: 4311427 (1982-01-01), Coad et al.
patent: 4441853 (1984-04-01), Kosugi
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4549843 (1985-10-01), Jagusch et al.
IBM Technical Disclosure Bulletin (Caccoma et al.), vol. 17, No. 12 (May 1975), p. 3577.

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