Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1996-11-14
1998-02-03
Font, Frank G.
Optics: measuring and testing
By polarized light examination
With light attenuation
25055929, G01B 1114
Patent
active
057150613
ABSTRACT:
In an apparatus for optically measuring a sample by irradiating the same with a measuring beam through first and second annular reflecting mirrors, a through hole is provided in the first reflecting mirror and a lens is arranged in such through hole. An irradiated position on the sample is irradiated with a detecting beam from a semiconductor laser through the lens. A photosensitive device is arranged on the rear surface of the first reflecting mirror, so that respective intensity distributions of a measuring beam and the detecting beam reflected at the irradiated position can be detected. The surface state and the position of the target sample at the irradiated position are determined from the intensity distributions of these beams. Thus, the reliability of the result of a measurement can be improved.
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Dainippon Screen Mfg. Co,. Ltd.
Font Frank G.
Smith Zandra V.
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