Inspection apparatus with real time display

Details Inspection apparatus with real time display Inspection apparatus with real time display

1996-12-27

2000-08-01

Brock, Michael

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324555, G01R 31319

Patent

active

060972041

ABSTRACT:
An inspection apparatus comprises a prober section having a main chuck and a prober, and a loader section having a support table, a sub-chuck and a forceps assembly. A controller controlls the forceps assembly, the sub-chuck, the main chuck and the prober such that the forceps assembly conveys a semiconductor wafer in a cassette on the table before inspection from the cassette to the sub-chuck, the sub-chuck prealigns the semiconductor wafer, the forceps assembly conveys the prealigned semiconductor wafer to the main chuck, the prober inspects the semiconductor wafer supported by the main chuck, and then the forceps assembly conveys the inspected semiconductor wafer to the cassette. A wafer state display device is provided for performing display on a display screen so as to visually recognize whether the semiconductor wafer in the cassette is not inspected or has been inspected, and for graphically displaying movement of the semiconductor wafer between the cassette and the main chuck on the display screen in real time.

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patent: 5670888 (1997-09-01), Cheng
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