Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1996-03-12

1998-02-03

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 46, 356401, 250548, H01L 2127, G03F 720, G03F 900

Patent

active

057150370

ABSTRACT:
The present invention provides a scanning exposure apparatus for projecting an image of a pattern area of a mask having a first alignment mark onto a photosensitive substrate disposed on a substrate stage. A second alignment mark is provided on at least one of the photosensitive substrate and the substrate stage. The scanning exposure apparatus includes a plurality of projection optical systems disposed along a predetermined direction and adapted to receive the luminous fluxes passed through the mask and to project elected images of unchanged dimension of the plurality of illuminated regions of the mask onto the substrate. There is provided a mark detection system for detecting the first alignment mark on the mask and the second alignment mark, and at least one of the projection optical systems constitutes a part of the mark detection system.

REFERENCES:
patent: 5309197 (1994-05-01), Mori et al.
patent: 5579147 (1996-11-01), Mori et al.

Affiliated with

Also associated with

Rating

Scanning exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-667332