Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1996-09-19
2000-08-01
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310328, 310330, H01L 4108
Patent
active
060971339
ABSTRACT:
The present invention provides a thin piezoelectric film having a high piezoelectric strain constant and a good adhesion with a lower electrode which can be produced without being cracked. The present invention also provides an ink jet recording head comprising this thin piezoelectric film as a vibrator. The thin piezoelectric film element of the present invention comprises a PZT film 14 made of a polycrystalline substance, and an upper electrode 16 and a lower electrode 12 arranged with the PZT film interposed therebetween. The grain boundary of the crystalline constituting the PZT film is present almost perpendicular to the surface of the electrode. Further, the orientation of the crystalline constituting the PZT film is controlled to a desired range.
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patent: 5504388 (1996-04-01), Kimura et al.
patent: 5594292 (1997-01-01), Takeuchi
patent: 5600197 (1997-02-01), Takeuchi
patent: 5691593 (1997-11-01), Takeuchi
patent: 5774961 (1998-07-01), Takeuchi
Kamei Hiroyuki
Qiu Hong
Shimada Masato
Takahashi Tetsushi
Budd Mark O.
Seiko Epson Corporation
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