Energy filter

Details Energy filter Energy filter

1998-02-27

2000-08-01

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250396ML, H01J 4000, H01J 4700

Patent

active

060970286

ABSTRACT:
There is disclosed a highly isochromatic electron spectroscopic imaging filter providing good energy resolution even in a microscope image having a wide field of view. To reduce the difference in energy between the vicinity of the center of the image on the pupil plane and peripheral portions, the relation LL/L.sub.5 > is satisfied, where LL is the distance from the pupil plane to the slit plane S and L.sub.5 is the distance from the exit end surface of the filter to the slit plane S.

REFERENCES:
patent: 4740704 (1988-04-01), Rose et al.
patent: 5097126 (1992-03-01), Krivanek
patent: 5126565 (1992-06-01), Rose
patent: 5177361 (1993-01-01), Krahl et al.
patent: 5811801 (1998-09-01), Tsuno
"High-Resolution imaging magnetic energy filters with simple structure", S. Lanio, OPTIK, 78, No. 3, (1986), pp. 99-107.
"Design of an omega filter for a 200 kV electron microscope", K. Tsuno and E. Munro, Rev. Sci. Instrum., 68 (1), Jan. 1997, pp. 109-115.

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