Stock material or miscellaneous articles – Composite – Of b – n – p – s – or metal-containing material
Patent
1986-12-03
1988-07-12
Pianalto, Bernard D.
Stock material or miscellaneous articles
Composite
Of b, n, p, s, or metal-containing material
427 38, 427 74, 427 79, 427 96, 427 99, 427226, 427228, 427249, 4272552, 4272556, 4272557, 4273977, 427402, 4274071, 427421, 4274301, 427387, 428688, B05D 306
Patent
active
047569778
ABSTRACT:
This invention relates to materials produced by diluting in a solvent a hydrogen silsesquioxane resin solvent solution which is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
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Gupta & Chin, Characterization of Spin-On Glass Films as a Planarizing Dielectric, 1985, 22, 349-365.
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Frye, et al., 1970, JACS 92, 5586.
Haluska Loren A.
Michael Keith W.
Tarhay Leo
Bittell James E.
Dow Corning Corporation
Pianalto Bernard D.
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