Polyether-polyester polyurethane polishing pads and related meth

Details Polyether-polyester polyurethane polishing pads and related meth Polyether-polyester polyurethane polishing pads and related meth

1998-09-23

2000-08-01

Eley, Timothy V.

Abrading

Abrading process

Utilizing fluent abradant

451 37, 451120, 451533, 51297, B24B 100

Patent

active

060959029

ABSTRACT:
The present invention provides a polishing pad fabricated from both polyester and polyether polyurethanes. Methods for manufacturing the pads and methods for use of the pads for polishing are also provided.

REFERENCES:
patent: 3284274 (1966-11-01), Hulslander et al.
patent: 3504457 (1970-04-01), Jacobsen et al.
patent: 4841680 (1989-06-01), Hoffstein et al.
patent: 5454752 (1995-10-01), Sexton et al.
patent: 5603654 (1997-02-01), Hayashi
patent: 5876269 (1999-03-01), Torii

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