Metal working – Method of mechanical manufacture – Electrical device making
Patent
1987-12-23
1989-10-03
Woodiel, Donald O.
Metal working
Method of mechanical manufacture
Electrical device making
29832, H01C 1702
Patent
active
048707457
ABSTRACT:
A silicon-based sensor includes a substrate, a sensor element, and a protective diaphragm mounting and covering the sensor element. The diaphragm is a silicon layer which, in a preferred embodiment, includes an etch-stop dopant. The etch-stop layer is sealed to the substrate so that the layer covers and mounts the sensor element to the substrate. The sensor is fabricated by forming a trough area in a surface of a silicon block (e.g., a silicon chip or wafer), treating the trough area with an etch-stop dopant (e.g., boron), depositing a sensor element onto the doped trough area, sealing at least the periphery of the doped trough area to a surface of a substrate (e.g., glass) so as to encapsulate the sensor element, and then etching away undoped regions of the silicon block so that the doped trough area remains as a protective diaphragm sealed to the substrate and covering the sensor element. It is also possible to form a bonding pad on untreated (e.g., undoped) discontinuous regions of an otherwise etch-stop treated trough layer so that when etched, the bonding pad is exposed to permit interconnection with electronic circuitry, yet the etch-stop treated layer remains so as to mount the bonding pad to the substrate.
REFERENCES:
patent: 3767494 (1973-10-01), Muraoka et al.
patent: 4091169 (1978-05-01), Bohg et al.
patent: 4227975 (1980-10-01), Hartman et al.
patent: 4239559 (1980-12-01), Ito
patent: 4256532 (1981-03-01), Magdo et al.
patent: 4348546 (1982-09-01), Little
patent: 4372803 (1983-02-01), Gigante
patent: 4420872 (1983-12-01), de Zaldivar
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4542650 (1985-09-01), Renken et al.
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4594889 (1986-07-01), McCarthy
patent: 4614119 (1986-09-01), Zavracky et al.
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4624138 (1986-11-01), Ono et al.
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4672354 (1987-06-01), Kurtz et al.
patent: 4680963 (1987-07-01), Tabata et al.
patent: 4682503 (1987-07-01), Higashi et al.
patent: 4683159 (1987-07-01), Bohrer et al.
patent: 4685331 (1987-08-01), Renken et al.
SAE Technical Paper, "Silicon Micromachining Technology for Automotive Applications", K. W. Lee and B. E. Walker.
Siemens-Bendix Automotive Electronics L.P.
Wells Russel C.
Woodiel Donald O.
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