Succinimide derivative, process for production and use thereof

Details Succinimide derivative, process for production and use thereof Succinimide derivative, process for production and use thereof

1998-04-03

1999-10-12

Ramsuer, Robert W.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

C07D20746

Patent

active

059657480

ABSTRACT:
N-(10-camphorsulfonyloxy)-succinimide represented by the formula (I): ##STR1## is provided, which can be produced by reacting N-hydroxysuccinimide with 10-camphorsulfonic acid, a salt thereof or a halide thereof. Using the compound as an acid generating agent, a resist composition can be obtained by including an alkali-soluble resin having a protective group removable by the action of an acid; and the resist composition is excellent in heat resistance, ratio of residual film thickness after developing, uniformity of film thickness, profile, photospeed and resolution and is improved in the time delay effect and attachment of pattern.

REFERENCES:
Patent Abstracts of Japan, vol. 950, No. 7 (JP 07-181678 A) Jul. 21, 1995.
Patent Abstracts of Japan, vol. 950, No. 9 (JP 07-244378 A) Sep. 19, 1995.

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