Process for manufacturing optical member for excimer laser

Details Process for manufacturing optical member for excimer laser Process for manufacturing optical member for excimer laser

1998-07-15

2000-08-01

Silverman, Stanley S.

Glass manufacturing

Processes

With chemically reactive treatment of glass preform

65 321, 65 332, 65392, 65424, 65425, 65441, C03C 1500, C03B 3700, C03B 27012, C03B 37018, C03B 3701

Patent

active

060949414

ABSTRACT:
An excellent quartz glass optical member having stable laser beam resistance, can be obtained by preparing quartz glass in a process having:

REFERENCES:
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5500031 (1996-03-01), Atkins et al.
patent: 5616159 (1997-04-01), Araujo et al.
R.W. Lee: Role of Hydroxyl in Diffusion of Hydrogen in Fused Silica, pp. 36-43.
Physical Sciences Data 15, Handbook of Glass Data, Part A, "Silica Glass And Binary Silicate Glasses", O.V. Mazurin et al. pp. 158-161.

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