Substrate processing method and apparatus

Details Substrate processing method and apparatus Substrate processing method and apparatus

1995-02-08

1997-09-09

Merritt, Karen B.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

414940, 414937, H01L 21304

Patent

active

056649274

ABSTRACT:
A substrate processing method includes the steps of accommodating a plurality of substrates within a carrier, where the carrier has a bottom that is open and has a function of stopping inclination of the substrates, transporting the substrates and the carrier to a processing chamber by a transport mechanism having a function of supporting weights of the substrates, and carrying out a process on the substrates within the processing chamber.

REFERENCES:
patent: 4682614 (1987-07-01), Silvernail et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4952115 (1990-08-01), Ohkase
patent: 4974619 (1990-12-01), Yu
patent: 5299901 (1994-04-01), Takayama
patent: 5383484 (1995-01-01), Thomas et al.
patent: 5452801 (1995-09-01), Horn

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