Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1998-02-26
1999-10-12
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430 22, G03F 900
Patent
active
059653035
ABSTRACT:
A method of fabricating a single layer phase shift mask is provided. The method is characterized by depositing an opaque layer by using a defect repair machine on a given place of the phase shift layer formed by a conventional method. The opaque layer is formed on the alignment mark. The single layer phase shift mask of the invention can provide better resolution for transferred patterns projected on the wafer and can avoid registration deviation and reduce a problem of misalignment of the alignment mark efficiently by decreasing the transmittance of the alignment mark, such as a reticule mark or a stepper mark.
REFERENCES:
patent: 5789116 (1998-08-01), Kim
Seiko Instruments Inc., Focused Ion Beam Mask Repair System, (12 pages).
United Microelectronics Corp.
Young Christopher G.
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