Manufacture of monolithic LED arrays for electroluminescent disp

Metal working – Plural diverse manufacturing apparatus including means for... – Common reciprocating support for spaced tools

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29576W, 29580, 29584, 204 24, 204 37R, 357 49, H01L 21302, H01L 21316

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043355013

ABSTRACT:
In the manufacture of a monolithic LED array, in particular a matrix array, in which portions of the array are electrically isolated from one another by channels cut or etched through the slice of n-type material, the channels are formed in two stages, relatively wide channels first being formed from the back surface of the slice to within 50 microns of the front surface, and filled with a glass frit which is bonded to the semiconductor material on each side of the channel, then narrower channels are formed from the front surface of the slice to meet the glass in the initial channels, and are similarly filled with glass frit. A glass powder suspension is introduced into each set of channels by spreading or spinning over the surface of the slice, or by electrophoretic deposition and/or capillary action, then the liquid suspension medium is removed and the glass powder is sintered.

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