Scattering-type particle detection device for use in high temper

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356339, 250227, G01N 1507, G01N 2100

Patent

active

048960489

ABSTRACT:
A particle detector includes optical fiber for conducting short wavelength radiation received from a radiation source through a chamber in which a semiconductor wafer is being processed. Light that is scattered by contaminant particles in the process chamber is sensed by an optical fiber pickup, and pulse signals are generated by a photosensing means to provide an indication of the number of particles within the process chamber.

REFERENCES:
patent: 4291983 (1981-09-01), Kraft et al.
patent: 4571079 (1986-02-01), Knollenberg
patent: 4595291 (1986-06-01), Tatsuno
patent: 4719360 (1988-01-01), Kontani et al.
patent: 4739177 (1988-04-01), Borden
patent: 4778593 (1988-10-01), Yamashita et al.
patent: 4779003 (1988-10-01), Tatsuno

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