Semiconductor thin film device with thick insulator at gate edge

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357 4, 357 56, H01L 2978, H01L 2712

Patent

active

050123114

ABSTRACT:
A semiconductor device comprises an insulating substrate; an island shaped single-crystalline semiconductor layer on the insulating substrate; and a conductor pattern provided on the single-crystalline semiconductor layer through the insulating layer and extending onto the insulating substrate. The edge region of the single-crystalline semiconductor layer, which region is below the conductor pattern, in the insulating layer is selectively formed with a larger thickness than other portions of the insulating layer.

REFERENCES:
patent: 4242156 (1980-12-01), Peel
patent: 4251828 (1981-02-01), Sakurai
patent: 4277884 (1981-07-01), Hsu

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