Method of detecting a position and apparatus therefor

Details Method of detecting a position and apparatus therefor Method of detecting a position and apparatus therefor

1994-06-22

1995-05-16

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742

Patent

active

054165628

ABSTRACT:
An apparatus for detecting the position, in a predetermined direction normal to a substrate, of at least one measurement point in a detection area on the substrate, includes:
a projection device for projecting a light-dark pattern consisting of a repetitive pattern of light and dark portions in a predetermined detection direction onto substantially the entire detection area;
a photoelectric detection device for detecting reflection light from the substrate, and outputting a photoelectric signal having a waveform representing the contrast of an image of the light-dark pattern in the detection direction;
a device for detecting the position of a waveform representing a dark portion of the light-dark pattern corresponding to the measurement point in the waveform of the photoelectric signal; and
a measurement device for measuring the position, in the predetermined direction, of the measurement point based on a deviation between the detected waveform position and a predetermined reference position.

REFERENCES:
patent: 4845530 (1989-07-01), Matsukura
patent: 4908656 (1990-03-01), Suwa et al.
patent: 5049925 (1991-09-01), Alton et al.
patent: 5101226 (1992-03-01), Beaulieu et al.
patent: 5137349 (1992-08-01), Taniguchi et al.
patent: 5291239 (1994-03-01), Jackson
patent: 5361122 (1994-11-01), Kataoka et al.

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