Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-04-25
1991-04-30
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
134 1, 134 19, 134 221, 427 38, 427 47, 427314, 427299, B05D 306
Patent
active
050117050
ABSTRACT:
The method of the present invention for forming a high-quality thin film on a substrate comprises a step of introducing a cleaning gas into a treatment container, and a step of bringing the cleaning gas into a plasma state in an electric field and a magnetic field in the treatment container, thus cleaning the inside of the treatment container by the plasma. According to this method, impurities, which prevent a high-quality thin film from being formed on the surface of the substrate, can be completely eliminated in a short time period, thus allowing the formation of a high-quality thin film.
Pianalto Bernard
Tel Sagami Limited
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