Laser activated MTOS microwave device

Details Laser activated MTOS microwave device Laser activated MTOS microwave device

1983-10-14

1985-07-23

James, Andrew J.

357 30, 357 58, 357 59, H01L 2978

Patent

active

045311439

ABSTRACT:
A metal thin oxide silicon (MTOS) optically-activated semiconductor device having respective thin, optically absorptive aluminum layers deposited over a thin oxide layer formed on a silicon substrate over a lightly doped, implant diffused region.

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Jacobus et al., "Optical Detector for Short-Wavelength Light", IBM Technical Disclosure Bulletin, vol. 14, No. 9, Feb. 1972, p. 2624.
LeBlanc, "One-Device Storage Cell Method", IBM Technical Disclosure Bulletin, vol. 16, No. 3, Aug. 1973, pp. 956-957.
Thaniyavarn et al., "Metal/Tunnel-Barrier/Semiconductor/Tunnel-Barrier/Metal Fast Photodetector", Appl. Phys. Lett. 40(3), Feb. 1982, pp. 255-257.

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