Solution coating apparatus

Details Solution coating apparatus Solution coating apparatus

1992-12-21

1995-05-16

Ball, Michael W.

Coating apparatus

With means to centrifuge work

118501, 269 21, 279 3, 451388, B05C 500, B05C 1302, B05C 1102

Patent

active

054156912

ABSTRACT:
A glass substrate is supported on a pedestal in a rotatable cup having an upper opening. The pedestal, which is substantially similar in shape to the glass substrate, has a ridge extending along an outer peripheral edge of an upper surface thereof, for engaging an outer peripheral edge of a lower surface of the glass substrate. After a resist solution to be coated on the glass substrate is applied to an upper surface thereof, the upper opening of the rotatable cup is closed by a cover, and then the rotatable cup is rotated to spread the applied resist solution uniformly over the upper surface under centrifugal forces. In one embodiment, the apparatus comprises an inner rotatable cup and an outer rotatable cup, each with its own separate cover. In another embodiment, a pedestal is mounted on the bottom of the inner cup having a vacuum chuck movable therein. In a third embodiment, a flow-rectifying plate is mounted on the lower surface of the cover whereby fluid from nozzles is ejected onto the upper surface of the flow rectifying plate and then into the cup.

REFERENCES:
patent: 3730134 (1973-05-01), Kadi
patent: 4640846 (1987-02-01), Kuo
patent: 4889069 (1989-12-01), Kawakami
patent: 5042421 (1991-08-01), Anbe
patent: 5234499 (1993-08-01), Sasaki et al.

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