Scanning method with scanning probe microscope

Measuring and testing – Surface and cutting edge testing – Roughness

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G01B 528

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active

056523777

ABSTRACT:
A scanning method with a scanning probe microscope, wherein the scan time and the timing of data measurement are optimized on the basis of transient characteristics of vibration of the cantilever, and the ruggedness of the sample surface and the influence of the magnetic force inclination are measured in one scanning process, at every point of measurement, using a magnetic probe, so that the ruggedness of the sample surface and the magnetic force distribution are separately detected.

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M. Radmacher et al., "From Molecules to Cells: Imaging Soft Samples with the Atomic Force Microscope", Science, vol. 257, 25 Sep. 1992, pp. 1900-1905.
Y. Martin et al; "Atomic Force Microscope--Force Mappling and Profiling On A Sub 100-A Scale"; May 15, 1987; pp. 4723-4729; Journal of Applied Physics; vol. 61; No. 10.

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