Permanent magnet arrangement for use in magnetron plasma process

Details Permanent magnet arrangement for use in magnetron plasma process Permanent magnet arrangement for use in magnetron plasma process

1994-01-10

1996-04-30

Picard, Leo P.

Electricity: magnetically operated switches, magnets, and electr

Magnets and electromagnets

Magnet structure or material

H03F 702

Patent

active

055128726

ABSTRACT:
A permanent magnet arrangement for magnetron plasma processing is disclosed. The arrangement includes a plurality of permanent magnets each of which has a fan-shaped or equilateral cross section parallel to the major surfaces thereof. The permanent magnets are assembled to form the permanent magnet arrangement which takes a disk-like configuration or a polygon. Each of the plural permanent magnets is made of rare-earth material and radially or essentially radially magnetized.

REFERENCES:
patent: 3781592 (1973-12-01), Harrold
patent: 4227105 (1980-10-01), Kumakura
patent: 4283647 (1981-08-01), Herr et al.
patent: 4605198 (1986-08-01), Kulish
patent: 4622122 (1986-11-01), Landau
patent: 4717876 (1988-01-01), Masi et al.
patent: 5170085 (1992-12-01), Shinto
Patent Abstracts of Japan No. 63277758.
Patent Abstracts of Japan No. 57188679.

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