Workpiece monitoring process using a workpiece carrier having an

Details Workpiece monitoring process using a workpiece carrier having an Workpiece monitoring process using a workpiece carrier having an

1996-01-18

1997-07-29

Graybill, David E.

Metal working

Barrier layer or semiconductor device making

437 7, 437 8, 437925, 36447815, H01L 2102, H01L 2168, B65D 8538

Patent

active

056517980

ABSTRACT:
The invention provides an apparatus for supporting a workpiece during the manufacturing process involving the workpiece and a process for manufacturing a workpiece using the apparatus. The apparatus includes a holding device for maintaining the workpiece in a predetermined orientation during performance of the manufacturing process. The holding device includes a plurality of members. The improvement comprises at least one member of the plurality of members including a plurality of indicators arranged in a predetermined order to establish an identifying code. Each indicator of the plurality of indicators absorbs a predetermined portion of incident light.

REFERENCES:
patent: 4833306 (1989-05-01), Milbrett
patent: 5399531 (1995-03-01), Wu
patent: 5442561 (1995-08-01), Yoshizawa et al.
patent: 5445271 (1995-08-01), Kakizaki et al.
patent: 5560775 (1996-10-01), Conboy et al.
patent: 5570293 (1996-10-01), Tanaka et al.

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