Method for controlling contamination in a clean room

Details Method for controlling contamination in a clean room Method for controlling contamination in a clean room

1984-01-13

1985-07-23

Wayner, William E.

55210, 55385A, F24F 1300

Patent

active

045302723

ABSTRACT:
A method is disclosed for controlling the concentration of airborne particulate contaminants in a clean room environment. Air under pressure is continually recirculated through the environment and filtered as it is circulating. Mixing of the filtered air is enhanced by imparting turbulence thereto sufficient to render the filtered air substantially homogenous. The particle count of the filtered air is sensed within the environment and the volume of air that is recirculated is controlled according to the sensed particle count to thereby maintain the particle count substantially at a preselectable concentration.

REFERENCES:
patent: 3367257 (1968-02-01), Raider et al.
patent: 3518814 (1970-07-01), Maynard
patent: 4100347 (1978-07-01), Norton
patent: 4137831 (1979-02-01), Howorth
patent: 4155725 (1979-05-01), Van Ackeren et al.
"Jet Stream Ventilation for Extreme Air Cleanliness", P. Kranz, Ashrae Journal, Aug. 1962, p. 37.
"Modern Control Engineering", K. Ogata, Sec 13-2, pp. 625-626.
"Ashrae Handbook & Product Directory 1978 Applications", American Society of Heating, Refrigerating & Air-Conditioning Engineers, Inc., Chapter 17.

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