Method of fabricating a trench capacitor cell for a semiconducto

Details Method of fabricating a trench capacitor cell for a semiconducto Method of fabricating a trench capacitor cell for a semiconducto

1988-10-07

1989-10-31

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 52, 437 60, 437203, 357 236, H01L 21306

Patent

active

048777501

ABSTRACT:
A novel method of fabricating a trench capacitor cell for a semiconductor device is disclosed. The method comprises:

REFERENCES:
patent: 4683643 (1987-08-01), Nakajima et al.
patent: 4704368 (1987-11-01), Goth et al.
patent: 4741802 (1988-03-01), Okumura
patent: 4786953 (1988-11-01), Morie et al.

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