Planar array of vertical-cavity, surface-emitting lasers

Details Planar array of vertical-cavity, surface-emitting lasers Planar array of vertical-cavity, surface-emitting lasers

1990-02-14

1991-07-09

Epps, Georgia

Coherent light generators

Particular active media

Semiconductor

372 45, H01S 319

Patent

active

050311875

ABSTRACT:
A planar array of vertical-cavity, surface-emitting diode lasers, and its method of making. The device comprises an active region having a quantum well region disposed between two Bragg reflector mirrors separated by a wavelength of the emitting laser. A large area of this structure is grown on a substrate and then laterally defined by implanting conductivity-reducing ions into the upper mirror in areas around the lasers. Thereby, the laterally defined laser array remains planar. Such an array can be made matrix-addressable by growing the structure on a conducting layer overlying an insulating substrate. After growth of the vertical structure, an etch or further implantation divides the conducting layer into strips forming bottom column electrodes. Top row electrodes are deposited in the perpendicular direction over the laterally defined top mirrors.

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Tai et al., "Room Temperature Continuous-Wave Vertical-Cavity Surface-Emitting GaAs Injection Laser", Appl. Phys. Letts., 55(24) Dec. 11, 1989, pp. 2473-2475.
K. Tai et al, "Use of implant isolation for fabrication of vertical cavity surface emitting laser diodes," Electronics Letters, vol. 25, Nov. 1989, pp. 1644-1645.
Yang et al, "Monolithic two dimensional surface emitting arrays of GaAs/AlGaAs Lasers,"Proceedings of SPIE, Oct. 1988, vol. 893, pp. 181-187.
Iga et al, "Surface emitting semiconductor laser array: Its advantage and future,"Journal of Vacuum Science Technology A, vol. 7, May/Jun. 1989, pp. 842-846.
Jewell et al, "Low-Threshold Electrically Pumped Vertical-Cavity Surface-Emitting Microlasers,"Electronics Letters, Aug. 1989 vol. 25, pp. 1123-1124.
Orenstein et al, "Vertical Cavity Laser Arrays with Planar Lateral Confinement," 1989, Postdeadline Paper, Optical Society of America, Oct. 1989 Annual Meeting, PD22.

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