Recessed element photosensitive detector array with optical isol

Details Recessed element photosensitive detector array with optical isol Recessed element photosensitive detector array with optical isol

1990-06-25

1991-07-09

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, 250349, 25037013, 25037008, G01J 100, H01L 3100

Patent

active

050308289

ABSTRACT:
A recessed element photosensitive detector array with optical isolation having an increased sensitivity to incident photons and having reduced crosstalk due to low angle of incidence photons is disclosed. The array comprises a substrate, a plurality of parallel elongate cavities formed within the substrate, photosensitive detector elements formed within the cavities, and an optical insulating layer adjacent each of said cavities to optically isolate the cavities from each other. The elongate cavities provide an increased detector element surface area which increases the sensitivity of the recesses element photosensitive detector array to incident photons. The increased sensitivity of the array is due to an increase in the probability of capturing incident photons. The optical isolation provided by the optical insulating layer substantially reduces crosstalk among adjacent detector elements for low angle of incidence photons. The increased probability of capturing incident photons eliminates the need for an anti-reflective coating.

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