Thin film field effect transistor

Details Thin film field effect transistor Thin film field effect transistor

1984-05-14

1987-06-02

Edlow, Martin H.

357 2, 357 15, 357 59, 357 45, 357 232, 357 237, H01L 2712, H01L 4500

Patent

active

046707638

ABSTRACT:
There is disclosed a film field effect transistor which can be operated at fast switching rates for use, for example, in video display applications. The transistor includes a body of silicon semiconductor material having a structure more ordered than amorphous material and less ordered than single crystalline material. The source and drain of the transistor comprise rectifying contacts formed on the body of silicon semiconductor material. Also disclosed are a method of making the transistor and an electronically addressable array system utilizing the transistor to advantage.

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Levinson et al, J. Appl. Phys., 53(2), Feb. 1982, pp. 1193-1202.
Matsui, Journ. of Appl. Phys., 55(6), Mar. 1984, pp. 1590-1595.

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