Noncontact full-line dynamic AC tester for integrated circuits

Details Noncontact full-line dynamic AC tester for integrated circuits Noncontact full-line dynamic AC tester for integrated circuits

1985-03-29

1987-06-02

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Plural, automatically sequential tests

324158R, 324158D, 250310, 250311, G01R 1512, G01R 1302, G01N 2322

Patent

active

046707107

ABSTRACT:
Simultaneous noncontact testing of voltages across a full line of test sites on an integrated circuit chip-to-test is achieved with high time resolution using photoelectron emission induced by a pulsed laser focussed to a line on the chip-to-test, together with high speed electrostatic deflection perpendicular to the line focus. Photoelectrons produced by the line focus of pulsed laser light are imaged to a line on an array detector, the measured photoelectron intensities at array points along this line representing voltages at corresponding points along the line illuminated by the laser focus. High speed electrostatic deflection applied during the laser pulse, perpendicular to the direction of the line focus, disperses the line image (column) on the array detector across a sequence of sites at right angles (rows), thereby revealing the time-dependence of voltages in the column of test sites with high time resolution (in the picosecond range).

REFERENCES:
patent: 2659264 (1953-11-01), Tuttle et al.
patent: 2663215 (1953-12-01), Tuttle et al.
patent: 2951961 (1960-09-01), Cooper, Jr.
patent: 3124790 (1964-03-01), Kuehler
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4301409 (1981-11-01), Miller et al.

Affiliated with

Also associated with

Rating

Noncontact full-line dynamic AC tester for integrated circuits does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Noncontact full-line dynamic AC tester for integrated circuits, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Noncontact full-line dynamic AC tester for integrated circuits will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-616209