Substrate holder

Details Substrate holder Substrate holder

1995-06-07

1996-10-08

Gellner, M. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 73, 355 76, G03B 2760

Patent

active

055636837

ABSTRACT:
A substrate holder is provided with two kinds of grooves (clearances) in the absorbing surface thereof. One kind of groove is made of a suitable depth so as to be able to quickly exhaust air and reduce pressure to thereby vacuum mount a substrate, and the other kind of groove is formed with a very small depth within such a range that there is no influence of dust being interposed between the holder and the substrate, in order to better the heat conduction between the substrate and the substrate holder. In addition, the area of the latter is made large as compared with the area of the former.

REFERENCES:
patent: 4522489 (1985-06-01), Bouwer
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4888488 (1989-12-01), Miyake

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