Method for making alignment-enhancing feed-through conductors fo

Metal working – Method of mechanical manufacture – Assembling or joining

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29580, 29589, 29590, 29591, 204 15, H01L 2128

Patent

active

044996551

ABSTRACT:
Alignment-enhancing electrically conductive feed-through paths are provided for the high-speed low-loss transfer of electrical signals between integrated circuits of a plurality of silicon-on-sapphire bodies arrayed in a stack. The alignment-enhancing feed-throughs are made by a process of this invention involving the drilling of holes through the body, double-sided sputtering, electroplating, and the filling of the holes with solder by capillary action. The alignment-enhancing feed-throughs are activated by forming a stack of wafers and remelting the solder whereupon the wafers, and the feed-through paths, are pulled into alignment by surface tension forces.

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