Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1983-08-29
1984-08-07
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361322, 427 79, H01G 410, H01G 406
Patent
active
044647018
ABSTRACT:
An improved method of fabricating a stable high dielectric constant and low leakage dielectric material which includes oxidizing at a temperature of about 600.degree. C. or higher a layer of a mixture of a transition metal nitride and silicon nitride to produce a mixture which includes an oxide of the transition metal and silicon nitride. The initial mixture of transition metal nitride and silicon nitride may be deposited by reactive sputtering techniques or other known deposition techniques on, a semiconductor or an electrically conductive layer, and the thickness of the mixture should be within the range of 3 to 50 nanometers. By depositing an electrically conductive layer on the oxidized mixture, a capacitor having a high dielectric, and low current leakage dielectric medium is provided.
REFERENCES:
patent: 3786323 (1974-01-01), Peters et al.
Roberts Stanley
Ryan James G.
Griffin Donald A.
International Business Machines - Corporation
Tacticos George
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