Radiant energy – Electron energy analysis
Patent
1982-08-19
1984-08-07
Smith, Alfred E.
Radiant energy
Electron energy analysis
250310, H01J 4944
Patent
active
044645716
ABSTRACT:
An improved electrostatic opposing field spectrometer of the type which may be utilized for undertaking measurements with an electron beam probe has an extraction electrode and an opposing field electrode and two spherical networks for generating a spherically symmetrical opposing field, the lower spherical network being at substantially the same potential as the extraction electrode and the upper spherical network being at a potential in the range of approximately 15 through -15 volts. The spherical network permit transmission of a large solid angle distribution of the secondary electrons emitted at the test point on the surface of a specimen. The centers of both spherical networks may be coincident at an imaginary source point.
REFERENCES:
patent: 3582649 (1971-06-01), Taylor
Balk et al., "Quantitative Voltage Contrast . . . ", Scanning Electron Microscopy/1976 (Part IV), Apr. 1976, pp. 615-624.
"VLSI Testing Using the Electron Probe," H. P. Feuerbaum, Scanning Electron Microscopy/1979/I, pp. 285-296.
"A Retarding Potential Field Electron Emission Spectrometer," C. Workowski, J. Phys. E: Sci. Instrum., vol. 13, 1980, pp. 67-73.
Berman Jack I.
Siemens Aktiengesellschaft
Smith Alfred E.
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