Micro-mechanical optical shutter

Details Micro-mechanical optical shutter Micro-mechanical optical shutter

1993-10-29

1995-10-17

Dzierzynski, Paul M.

Optical: systems and elements

Light control by opaque element or medium movable in or...

With rotating or pivoting element

359230, 359559, 359561, 310 42, 310 905, 216 24, 216 39, G02B 2602, G02B 2746, H01L 4108

Patent

active

054596025

ABSTRACT:
A micro-optical shutter array (92, 102) having a number of tiny shutters (10), which revolve so as to intermittently block light from a via (12), and which may be operated in either a stepping or continuous motion. The array (92, 102) may be batch manufactured using integrated circuit fabrication techniques. For each shutter, a via (12) is etched through a substrate (11). A rotor (13, 43, 53, 63) with at least one opening is fabricated over the via (12), such that as the rotor (13, 43, 53, 63) turns, radiation transmitted through the via (12) is selectively blocked or not blocked.

REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5252881 (1993-10-01), Muller et al.
patent: 5327286 (1994-07-01), Sampsell et al.

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